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Gold Stripe Optical Waveguides Fabricated by a Novel Double-Layered Liftoff Process
Jin Tae Kim, Suntak Park, Seung Goo Park, Min-su Kim, Myung-Hyun Lee, and Jung Jin Ju
vol. 31, no. 6, Dec. 2009, pp. 778-783.
http://dx.doi.org/10.4218/etrij.09.1209.0042
Keywords : Surface plasmons, polaritons, metal stripe, polymer waveguide.
  • Abstract
    • Abstract.

      To fabricate uniform and reliable thin gold stripes that provide low-loss optical waveguides, we developed a novel liftoff process placing an additional SiNx layer under conventional photoresists. By patterning a photoresist and over-etching the SiNx, the photoresist patterns become free-standing structures on a lower-cladding. This leads to uniform metal stripes with good reproducibility and effectively removes parasitic structures on the edge of the metal stripe in the image reversal photolithography process. By applying the newly developed process to polymer-based gold stripe waveguide fabrication, we improved the propagation losses about two times compared with that incurred by the conventional image-reversal process.
  • Authors
    • Authors

      Jin Tae Kim
      ETRI
      jintae@etri.re.kr
      Suntak Park
      ETRI
      spark@etri.re.kr
      Seung Goo Park
      ETRI
      skpark@etri.re.kr
      Min-su Kim
      ETRI
      kimms@etri.re.kr
      Myung-Hyun Lee
      Sungkyunkwan University
      mhlee@skku.edu
      Jung Jin Ju
      ETRI
      jjju@etri.re.kr
  • References
    • References

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