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[ Laser induced SiGe selective epitaxial growth (LI-SiGe-SEG) ] matched 1 Result(s)
No. Title Pub. Date

1

Excimer Laser-Assisted In Situ Phosphorous Doped Si(1-x)Gex Epilayer Activati...
Jicheul Bae, ETRI Journal, vol.25, no.4, Aug. 2003, pp 247-252

Aug. 2003


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