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Laser induced SiGe selective epitaxial growth (LI-SiGe-SEG)
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Title
Pub. Date
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Excimer
Laser
-Assisted In Situ Phosphorous Doped Si
(1-x)
Ge
x
Epilayer Activati...
Jicheul Bae, ETRI Journal, vol.25, no.4, Aug. 2003, pp 247-252
Aug. 2003
[1]
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